In this study, Al1-xInxN films with different band gap energy (Eg) were deposited by radiofrequency (RF) magnetron sputtering. The Eg of films shows a red-shift from 2.95 to 2.20 eV. We investigated the photo-response behaviors of the as-grown films under the illumination of LED with a center wavelength of 365, 532, and 650 nm, respectively. The wavelength of the detected light ...