The electrical insulation strength of anodic Al2O3 coatings with vias for power multichip modules
Bibliographic entry
Shimanovich, D. L. The electrical insulation strength of anodic Al2O3 coatings with vias for power multichip modules / D. L. Shimanovich // Новые горизонты - 2022 : сборник материалов IX Белорусско-Китайского молодежного инновационного форума, 10-11 ноября 2022 года / Белорусский национальный технический университет. – Минск : БНТУ, 2022. – Т. 1. – С. 76-78.
Abstract
The technological methods and regimes to improve the electrical insulation strength of anodic Al2O3 in vias of double-sided alumina bases for potential use in power multichip modules were discussed. It was shown that after using of the appropriate technological approaches the breakdown voltages of the obtained test samples were up to ~6 kV on working surfaces without holes and up to ~2,5 kV in vias.