Low-power gas sensor on nanostructured dielectric membrane
Bibliographic entry
Low-power gas sensor on nanostructured dielectric membrane / E. A. Belahurov [et al.] // Нано- и микросистемная техника. – 2015. – № 6. – С. 40-42.
Abstract
The article presents a technology for manufacture of a gas sensor with a two-layer nanostructured dielectric membrane on a silicon substrate and its characteristics. Selection of the correct mathematical model ensures a good correlation between the experimental and calculated current-voltage characteristics of the sensor and makes it possible to evaluate the effect of porosity of the dielectric membrane on the value of the sensor’s power consumption, temperature of its sensitive layer and the related thermomechanical stresses. It demonstrates that the temperature range (150—350 °C) of the sensor’s sensitive layer, where the sensor’s response to 1 ppm CO is detected, is ensured due to power consumption from 5,0 mW up to 15,5 mW.