| dc.description.abstract | The transition to micro— and nano-sized structures results in brooding the list of materials used in MEMS developing. In the presented work on the unified basis the properties of surface acoustic waves in more than 60 isotropic cubic materials with different functional properties (metals, dielectrics, semiconductors, piezoelectrics, magnetostrictive stuffs, superconductors) are studied. Semiconducting materials GaAs, Si, InSb are interesting from the point of view of developing integral sensory microsystems including sensing, executive and processor units. The single-crystal strontium titanate SrTi03 is characterized by high acoustic nonlinearity and is perspective for low-noise devices with superconducting metallization of SAW structures. Iron ittrium granatum Y3Fe50I5 (IIG) has a low elastic anisotropy. The strong magnetostriction, appropriate IIG, allows to use it in devices, based on interaction of SAW with spin waves. | ru |
